Bio-MEMS: Technologies and Applications

Book Preface

Applications of microelectromechanical systems (MEMS) and microfabrication have spread to different fields of engineering and science in recent years. Perhaps the most exciting development in the application of MEMS technology has occurred in the biological and biomedical areas. In addition to key fluidic components, such as microvalves, pumps, and all kinds of novel sensors that can be used for biological and biomedical analysis and measurements, many other types of so-called micro total analysis systems (TAS) have been developed. The advantages of such systems are that microvolumes of biological or biomedical samples can be delivered and processed for testing and analysis in an integrated fashion, thereby dramatically reducing the required human involvement in many steps of sample handling and processing. This helps to reduce the overall cost of measurement and time, while improving the sensitivity in most cases.

Many books have been published on these subjects in recent years, but most of them have focused primarily on various fabrication technologies with a few application areas highlighted. Unfortunately, in this burgeoning area, only a couple of books have been directed specifically toward biomedical MEMS. As MEMS applications spread to all corners of science and engineering, more and more universities and colleges are offering courses in the bio-MEMS area. In comparison with other MEMS areas, which typically involve different engineering disciplines, such as the mechanical, electrical, and optical fields, the development of bio-MEMS devices and systems involves a truly interdisciplinary integration of basic sciences, medical sciences, and engineering. This is the primary reason bio-MEMS is still in the earliest stages of development in comparison with electrical and mechanical sensing devices and systems. Due to the complexity and interdisciplinary nature of bio-MEMS, it is critical to include a diverse range of expertise in the composition of a book that attempts to cover the bio-MEMS area from both a fabrication and application point of view. This is the reason we have assembled a large group of leading researchers actively working in basic science, engineering, and biomedical areas to contribute to this book. Bio- MEMS: Technologies and Applications is divided into three sections:

1. Basic Bio-MEMS Fabrication Technologies
2. Microfluidic Devices and Components for Bio-MEMS
3. Sensing Technologies and Bio-MEMS Applications

The book targets audiences in the basic sciences and engineering, both industrial engineers and academic researchers. Efforts have been made to ensure that while enough topics on the cutting edge of bio-MEMS research are covered, the book is still easy to read. In addition to structurally organizing the book from basic materials to advanced topics, we have made sure that each chapter and subject area are covered beginning with basic principles and fundamentals. Because of the shortage of suitable textbooks in this area, this collection is designed to be reasonable for graduate education as well as working application engineers who are interested in getting into this exciting new field.

Table of Contents
Preface…………………………………………………………………………………………. v
About the Editors ……………………………………………………………………… vii
Contributors ……………………………………………………………………………….. ix
1 Introduction …………………………………………………………………………. 1
Wanjun Wang and Steven A. Soper
Part I Basic Bio-MEMS Fabrication Technologies
2 UV Lithography of Ultrathick SU-8 for Microfabrication of High-Aspect-Ratio Microstructures and Applications in Microfluidic and Optical Components
Ren Yang and Wanjun Wang
3 The LIGA Process: A Fabrication Process for High-Aspect-Ratio Microstructures in Polymers, Metals, and Ceramics……………. 43
Jost Goettert
4 Nanoimprinting Technology for Biological Applications ……. 93
Sunggook Park and Helmut Schift
5 Hot Embossing for Lab-on-a-Chip Applications …………………117
Ian Papautsky
Part II Microfluidic Devices and Components for Bio-MEMS
6 Micropump Applications in Bio-MEMS ……………………………. 143
Jeffrey D. Zahn
7 Micromixers ……………………………………………………………………… 177
Dimitris E. Nikitopoulos and A. Maha

8 Microfabricated Devices for Sample Extraction, Concentrations, and Related Sample Processing Technologies …………………… 213
Gang Chen and Yuehe Lin
9 Bio-MEMS Devices in Cell Manipulation: Microflow Cytometry and Applications………………………………………………………………. 237
Choongho Yu and Li Shi
Part III Sensing Technologies for Bio-MEMS Applications
10 Coupling Electrochemical Detection with Microchip Capillary Electrophoresis………………………………………………….. 265
Carlos D. García and Charles S. Henry
11 Culture-Based Biochip for Rapid Detection of Environmental Mycobacteria
Ian Papautsky and Daniel Oerther
12 MEMS for Drug Delivery …………………………………………………. 325
Kabseog Kim and Jeong-Bong Lee
13 Microchip Capillary Electrophoresis Systems for DNA Analysis 349
14 Bio-MEMS Devices for Proteomics …………………………………… 363
Justin S. Mecomber, Wendy D. Dominick, Lianji Jin, and Patrick A. Limbach
15 Single-Cell and Single-Molecule Analyses Using Microfluidic Devices
Malgorzata A. Witek, Mateusz L. Hupert, and Steven A. Soper
16 Pharmaceutical Analysis Using Bio-MEMS……………………….. 443
Celeste Frankenfeld and Susan Lunte